memsstar’s ORBIS Alpha Etch System Installed in TUM Quantum Networks Lab

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memsstar Ltd., a leading provider of etch and deposition equipment to researchers and manufacturers of semiconductors and micro-electromechanical systems (MEMS), announced the installation and characterisation of its ORBIS™ Alpha Xeric Oxide Etch system at the Garching, Germany, campus of the Technical University of Munich (TUM). TUM’s Department of Quantum Networks will employ the ORBIS Alpha to develop next-generation quantum devices, including micromechanical structuring of silicon nanostructure components – from single chips to 200mm wafers.

The tool will be central to the department’s multifaceted integrated photonics research and manufacturing efforts. TUM will implement the ORBIS Alpha’s vapour-phase hydrogen fluoride (HF) etching in its fabrication processes, such as stiction-free release of photonic crystals to research light propagation within these structures for quantum communications.

“This project strongly showcases ORBIS’s capabilities and our approach to working with our customers to develop processes that address their specific requirements,” said memsstar CEO Tony McKie, CEO. “The work being done at Garching is truly leading-edge and requires the advanced control and capabilities of our technology to meet the varied application requirements in research there.”

Dr. Andreas Reiserer, professor of quantum networks and leader of the Quantum Networks Group at TUM, stated, “We selected the memsstar ORBIS Alpha system because it offers the best etch process capabilities for investigating novel, high-quality approaches for designing quantum networking devices. Moreover, memsstar’s vapour-phase HF etching technology offers the highest possible selectivity between silica and silicon nitride for the application of creating SiN structures as a waveguide with the mean of vapour-phase etching.”

The ORBIS Alpha platform is an enabling technology for next-generation MEMS, including nanoelectromechanical systems (NEMS) and micro-optoelectromechanical systems (MOEMS), as well as for nanodevice research. It includes proven hardware that delivers excellent uniformity and repeatability. Designed for R&D facilities, ORBIS Alpha is based on memsstar’s production-proven continuous-flow processing technology. This combination of benefits enables advanced process development on a cost-effective platform.